Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500774 | Method and apparatus for an increased throughput furnace nitride BARC process | — | 2002-12-31 |
| 6482573 | Exposure correction based on reflective index for photolithographic process control | Zicheng Gary Ling, Weizhong Wang, Warren T. Yu, Eric Kent | 2002-11-19 |
| 6475892 | Simplified method of patterning polysilicon gate in a semiconductor device | — | 2002-11-05 |
| 6458212 | Mesh filter design for LPCVD TEOS exhaust system | Fuodoor Gologhlan, David Chi, Kent Kuohua Chang, Hector Serrato | 2002-10-01 |
| 6337264 | Simplified method of patterning polysilicon gate in a semiconductor device including an oxime layer as a mask | — | 2002-01-08 |
| 6335235 | Simplified method of patterning field dielectric regions in a semiconductor device | Carl P. Babcock | 2002-01-01 |