Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482573 | Exposure correction based on reflective index for photolithographic process control | Jayendra D. Bhakta, Zicheng Gary Ling, Warren T. Yu, Eric Kent | 2002-11-19 |
| 6380618 | Fabrication of integrated circuits on both sides of a semiconductor wafer | Lei Wang | 2002-04-30 |
| 6342432 | Shallow trench isolation formation without planarization mask | — | 2002-01-29 |