Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482573 | Exposure correction based on reflective index for photolithographic process control | Jayendra D. Bhakta, Zicheng Gary Ling, Weizhong Wang, Eric Kent | 2002-11-19 |
| 6345209 | Method of using critical dimension mapping to qualify a new integrated circuit manufacturing process | — | 2002-02-05 |
| 6345210 | Method of using critical dimension mapping to qualify a reticle used in integrated circuit fabrication | — | 2002-02-05 |
| 6345211 | Method of using critical dimension mapping to optimize speed performance of microprocessor produced using an integrated circuit manufacturing process | — | 2002-02-05 |