Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498104 | Method of in-situ cleaning for LPCVD TEOS pump | Fuodoor Gologhlan, Kent Kuohua Chang, Hector Serrato | 2002-12-24 |
| 6458212 | Mesh filter design for LPCVD TEOS exhaust system | Fuodoor Gologhlan, Kent Kuohua Chang, Hector Serrato, Jayendra D. Bhakta | 2002-10-01 |
| 6433383 | Methods and arrangements for forming a single interpoly dielectric layer in a semiconductor device | Mark T. Ramsbey, Unsoon Kim, Kenneth Wo-Wai Au, James M. Markarian | 2002-08-13 |