Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498104 | Method of in-situ cleaning for LPCVD TEOS pump | Fuodoor Gologhlan, David Chi, Kent Kuohua Chang | 2002-12-24 |
| 6458212 | Mesh filter design for LPCVD TEOS exhaust system | Fuodoor Gologhlan, David Chi, Kent Kuohua Chang, Jayendra D. Bhakta | 2002-10-01 |