Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500587 | Binary and attenuating phase-shifting masks for multiple wavelengths | Kouros Ghandehari, Bhanwar Singh | 2002-12-31 |
| 6475811 | System for and method of using bacteria to aid in contact hole printing | — | 2002-11-05 |
| 6423555 | System for determining overlay error | — | 2002-07-23 |
| 6358843 | Method of making ultra small vias for integrated circuits | Bhanwar Singh | 2002-03-19 |
| 6335235 | Simplified method of patterning field dielectric regions in a semiconductor device | Jayendra D. Bhakta | 2002-01-01 |