Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500587 | Binary and attenuating phase-shifting masks for multiple wavelengths | Bhanwar Singh, Carl P. Babcock | 2002-12-31 |
| 6501555 | Optical technique to detect etch process termination | Bhanwar Singh, Angela T. Hui | 2002-12-31 |
| 6475867 | Method of forming integrated circuit features by oxidation of titanium hard mask | Angela T. Hui, Bhanwar Singh | 2002-11-05 |
| 6433854 | Method of illumination uniformity in photolithographic systems | Daniel C. Baker, Satyendra Sethi | 2002-08-13 |
| 6410421 | Semiconductor device with anti-reflective structure and methods of manufacture | Samit Sengupta | 2002-06-25 |
| 6403500 | Cross-shaped resist dispensing system and method | James Yu, Bhanwar Singh | 2002-06-11 |