Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433854 | Method of illumination uniformity in photolithographic systems | Daniel C. Baker, Kouros Ghandehari | 2002-08-13 |
| 6411367 | Modified optics for imaging of lens limited subresolution features | Daniel C. Baker, Subhas Bothra | 2002-06-25 |
| 6372522 | Use of optimized film stacks for increasing absorption for laser repair of fuse links | Milind Weling, Subhas Bothra | 2002-04-16 |