Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433854 | Method of illumination uniformity in photolithographic systems | Kouros Ghandehari, Satyendra Sethi | 2002-08-13 |
| 6411367 | Modified optics for imaging of lens limited subresolution features | Subhas Bothra, Satyendra Sethi | 2002-06-25 |