Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410440 | Method and apparatus for a gaseous environment providing improved control of CMP process | Charles Franklin Drill | 2002-06-25 |
| 6387720 | Waveguide structures integrated with standard CMOS circuitry and methods for making the same | Michael N. Misheloff, Subhas Bothra, Calvin T. Gabriel | 2002-05-14 |
| 6380092 | Gas phase planarization process for semiconductor wafers | Rao Annapragada, Calvin T. Gabriel | 2002-04-30 |
| 6372522 | Use of optimized film stacks for increasing absorption for laser repair of fuse links | Subhas Bothra, Satyendra Sethi | 2002-04-16 |
| 6353261 | Method and apparatus for reducing interconnect resistance using an interconnect well | — | 2002-03-05 |