Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413152 | Apparatus for performing chemical-mechanical planarization with improved process window, process flexibility and cost | Samit Sengupta | 2002-07-02 |
| 6410440 | Method and apparatus for a gaseous environment providing improved control of CMP process | Milind Weling | 2002-06-25 |
| 6347979 | Slurry dispensing carrier ring | — | 2002-02-19 |