Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459153 | Compositions for improving interconnect metallization performance in integrated circuits | — | 2002-10-01 |
| 6433433 | Semiconductor device with misaligned via hole | — | 2002-08-13 |
| 6413152 | Apparatus for performing chemical-mechanical planarization with improved process window, process flexibility and cost | Charles Franklin Drill | 2002-07-02 |
| 6410421 | Semiconductor device with anti-reflective structure and methods of manufacture | Kouros Ghandehari | 2002-06-25 |