Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500757 | Method and apparatus for controlling grain growth roughening in conductive stacks | Jeffrey A. Shields | 2002-12-31 |
| 6444593 | Surface treatment of low-K SiOF to prevent metal interaction | Minh Van Ngo, Richard J. Huang | 2002-09-03 |
| 6436850 | Method of degassing low k dielectric for metal deposition | — | 2002-08-20 |
| 6420104 | Method of reducing contact size by spacer filling | Bharath Rangarajan, Stephen Keetai Park | 2002-07-16 |
| 6380556 | Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure | David Bang, Takeshi Nogami, Shekhar Pramanick | 2002-04-30 |
| 6335273 | Surface treatment of low-K SiOF to prevent metal interaction | Richard J. Huang, Simon S. Chan | 2002-01-01 |
| 6335533 | Electron microscopy sample having silicon nitride passivation layer | Dawn Hopper, Lu You | 2002-01-01 |