Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380556 | Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure | Takeshi Nogami, Guarionex Morales, Shekhar Pramanick | 2002-04-30 |