Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501534 | Automated periodic focus and exposure calibration of a lithography stepper | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan | 2002-12-31 |
| 6479817 | Cantilever assembly and scanning tip therefor with associated optical sensor | Sanjay K. Yedur, Bhanwar Singh, Bryan K. Choo | 2002-11-12 |
| 6459945 | System and method for facilitating determining suitable material layer thickness in a semiconductor device fabrication process | Bhanwar Singh, Bharath Rangarajan | 2002-10-01 |
| 6452161 | Scanning probe microscope having optical fiber spaced from point of hp | Sanjay K. Yedur, Bhanwar Singh, Bryan K. Choo | 2002-09-17 |
| 6429141 | Method of manufacturing a semiconductor device with improved line width accuracy | Minh Van Ngo, Bhanwar Singh, Dawn Hopper | 2002-08-06 |
| 6383947 | Anti-reflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologies | Paul R. Besser, Bhanwar Singh, Darrell M. Erb, Susan H. Chen | 2002-05-07 |