Issued Patents 2002
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479820 | Electrostatic charge reduction of photoresist pattern on development track | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan, Khoi A. Phan | 2002-11-12 |
| 6479817 | Cantilever assembly and scanning tip therefor with associated optical sensor | Sanjay K. Yedur, Bhanwar Singh, Carmen Morales | 2002-11-12 |
| 6462343 | System and method of providing improved CD-SEM pattern recognition of structures with variable contrast | — | 2002-10-08 |
| 6459482 | Grainless material for calibration sample | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Michael K. Templeton +1 more | 2002-10-01 |
| 6455847 | Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts | Sanjay K. Yedur, Bhanwar Singh | 2002-09-24 |
| 6451512 | UV-enhanced silylation process to increase etch resistance of ultra thin resists | Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Michael K. Templeton +1 more | 2002-09-17 |
| 6452161 | Scanning probe microscope having optical fiber spaced from point of hp | Sanjay K. Yedur, Bhanwar Singh, Carmen Morales | 2002-09-17 |
| 6444381 | Electron beam flood exposure technique to reduce the carbon contamination | Bhanwar Singh, Ramkumar Subramanian, Michael K. Templeton, Bharath Rangarajan, Khoi A. Phan +1 more | 2002-09-03 |
| 6437329 | Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube | Sanjay K. Yedur, Bhanwar Singh | 2002-08-20 |
| 6423479 | Cleaning carbon contamination on mask using gaseous phase | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2002-07-23 |
| 6396059 | Using a crystallographic etched silicon sample to measure and control the electron beam width of a SEM | Bhanwar Singh, Sanjay K. Yedur | 2002-05-28 |
| 6373053 | Analysis of CD-SEM signal to detect scummed/closed contact holes and lines | Bhanwar Singh, Sanjay K. Yedur, Khoi A. Phan | 2002-04-16 |
| 6371134 | Ozone cleaning of wafers | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2002-04-16 |
| 6354133 | Use of carbon nanotubes to calibrate conventional tips used in AFM | Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2002-03-12 |