Issued Patents 1994
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362526 | Plasma-enhanced CVD process using TEOS for depositing silicon oxide | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 1994-11-08 |
| 5354715 | Thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 1994-10-11 |
| 5350479 | Electrostatic chuck for high power plasma processing | John Trow, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |
| 5349313 | Variable RF power splitter | John Trow, Craig A. Roderick | 1994-09-20 |
| 5315473 | Isolated electrostatic chuck and excitation method | Edward A. Gritters | 1994-05-24 |
| 5312778 | Method for plasma processing using magnetically enhanced plasma chemical vapor deposition | Chan-Lon Yang, John M. White | 1994-05-17 |
| 5300460 | UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers | Craig A. Roderick, Chan-Lon Yang, David N. Wang, Dan Maydan | 1994-04-05 |