Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |
| 5349313 | Variable RF power splitter | Kenneth S. Collins, Craig A. Roderick | 1994-09-20 |
| 5346579 | Magnetic field enhanced plasma processing chamber | Joel M. Cook | 1994-09-13 |