Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, John Trow, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright +1 more | 1994-09-27 |
JM
Jeffrey Marks
Overall (1994): #117,116 of 165,921Top 75%
1
Patents 1994