Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, John Trow, Joshua Chiu-Wing Tsui, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |
| 5349313 | Variable RF power splitter | Kenneth S. Collins, John Trow | 1994-09-20 |
| 5300460 | UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers | Kenneth S. Collins, Chan-Lon Yang, David N. Wang, Dan Maydan | 1994-04-05 |