Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312778 | Method for plasma processing using magnetically enhanced plasma chemical vapor deposition | Kenneth S. Collins, John M. White | 1994-05-17 |
| 5300460 | UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers | Kenneth S. Collins, Craig A. Roderick, David N. Wang, Dan Maydan | 1994-04-05 |