Issued Patents 1989
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886570 | Processing apparatus and method | Robert T. Matthews, Lee M. Loewenstein, Rhett B. Jucha, Randall C. Hildenbrand, John I. Jones | 1989-12-12 |
| 4882008 | Dry development of photoresist | Cesar M. Garza, Monte A. Douglas, Lee M. Loewenstein | 1989-11-21 |
| 4878994 | Method for etching titanium nitride local interconnects | Rhett B. Jucha, Tom Tang, Lee M. Loewenstein | 1989-11-07 |
| 4877757 | Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma | Rudy L. York, Joseph D. Luttmer, Patricia B. Smith | 1989-10-31 |
| 4875989 | Wafer processing apparatus | Robert T. Matthews, Lee M. Loewenstein, Joe V. Abernathy, Timothy A. Wooldridge | 1989-10-24 |
| 4874723 | Selective etching of tungsten by remote and in situ plasma generation | Rhett B. Jucha, Duane E. Carter, Sue Crank | 1989-10-17 |
| 4872938 | Processing apparatus | Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson, John I. Jones +2 more | 1989-10-10 |
| 4867841 | Method for etch of polysilicon film | Lee M. Loewenstein, Rhett B. Jucha | 1989-09-19 |
| 4863561 | Method and apparatus for cleaning integrated circuit wafers | Dean W. Freeman | 1989-09-05 |
| 4863558 | Method for etching tungsten | Rhett B. Jucha, Sue Crank | 1989-09-05 |
| 4855160 | Method for passivating wafer | Joseph D. Luttmer, Patricia B. Smith, Rudy L. York | 1989-08-08 |
| 4855016 | Method for etching aluminum film doped with copper | Rhett B. Jucha, Lee M. Loewenstein | 1989-08-08 |
| 4849067 | Method for etching tungsten | Rhett B. Jucha, Duane E. Carter, Sue Crank, John I. Jones | 1989-07-18 |
| 4849068 | Apparatus and method for plasma-assisted etching | Duane E. Carter, Rhett B. Jucha | 1989-07-18 |
| 4844773 | Process for etching silicon nitride film | Lee M. Loewenstein | 1989-07-04 |
| 4842680 | Advanced vacuum processor | Timothy J. Wooldridge, Duane E. Carter | 1989-06-27 |
| 4842676 | Process for etch of tungsten | Rhett B. Jucha, Lee M. Loewenstein | 1989-06-27 |
| 4842686 | Wafer processing apparatus and method | Lee M. Loewenstein, Robert T. Matthews, John I. Jones, Rhett B. Jucha | 1989-06-27 |
| 4842687 | Method for etching tungsten | Rhett B. Jucha | 1989-06-27 |
| 4838984 | Method for etching films of mercury-cadmium-telluride and zinc sulfid | Joseph D. Luttmer, Patricia B. Smith, Rudy L. York, Lee M. Loewenstein, Rhett B. Jucha | 1989-06-13 |
| 4838990 | Method for plasma etching tungsten | Rhett B. Jucha, John I. Jones | 1989-06-13 |
| 4837113 | Method for depositing compound from group II-VI | Joseph D. Luttmer, Rudy L. York, Patricia B. Smith | 1989-06-06 |
| 4836905 | Processing apparatus | Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson, James G. Bohlman +2 more | 1989-06-06 |
| 4832778 | Processing apparatus for wafers | Dean W. Freeman, Robert T. Matthews, Joel T. Tomlin | 1989-05-23 |
| 4832779 | Processing apparatus | Wayne G. Fisher, Tommy J. Bennett, Robert T. Matthews | 1989-05-23 |