Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882299 | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | James B. Burris | 1989-11-21 |
| 4877753 | In situ doped polysilicon using tertiary butyl phosphine | — | 1989-10-31 |
| 4863561 | Method and apparatus for cleaning integrated circuit wafers | Cecil J. Davis | 1989-09-05 |
| 4832778 | Processing apparatus for wafers | Cecil J. Davis, Robert T. Matthews, Joel T. Tomlin | 1989-05-23 |
| 4822450 | Processing apparatus and method | Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand +1 more | 1989-04-18 |
| 4810673 | Oxide deposition method | — | 1989-03-07 |