Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882299 | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | Dean W. Freeman | 1989-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882299 | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | Dean W. Freeman | 1989-11-21 |