Issued Patents 1989
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886570 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Rhett B. Jucha, Randall C. Hildenbrand, John I. Jones | 1989-12-12 |
| 4882008 | Dry development of photoresist | Cesar M. Garza, Monte A. Douglas, Cecil J. Davis | 1989-11-21 |
| 4878994 | Method for etching titanium nitride local interconnects | Rhett B. Jucha, Cecil J. Davis, Tom Tang | 1989-11-07 |
| 4875989 | Wafer processing apparatus | Cecil J. Davis, Robert T. Matthews, Joe V. Abernathy, Timothy A. Wooldridge | 1989-10-24 |
| 4872938 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson +2 more | 1989-10-10 |
| 4867841 | Method for etch of polysilicon film | Cecil J. Davis, Rhett B. Jucha | 1989-09-19 |
| 4857140 | Method for etching silicon nitride | — | 1989-08-15 |
| 4855016 | Method for etching aluminum film doped with copper | Rhett B. Jucha, Cecil J. Davis | 1989-08-08 |
| 4844773 | Process for etching silicon nitride film | Cecil J. Davis | 1989-07-04 |
| 4842686 | Wafer processing apparatus and method | Cecil J. Davis, Robert T. Matthews, John I. Jones, Rhett B. Jucha | 1989-06-27 |
| 4842676 | Process for etch of tungsten | Rhett B. Jucha, Cecil J. Davis | 1989-06-27 |
| 4838984 | Method for etching films of mercury-cadmium-telluride and zinc sulfid | Joseph D. Luttmer, Cecil J. Davis, Patricia B. Smith, Rudy L. York, Rhett B. Jucha | 1989-06-13 |
| 4836905 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson +2 more | 1989-06-06 |
| 4830705 | Method for etch of GaAs | Cecil J. Davis | 1989-05-16 |
| 4828649 | Method for etching an aluminum film doped with silicon | Cecil J. Davis, Rhett B. Jucha | 1989-05-09 |
| 4822450 | Processing apparatus and method | Cecil J. Davis, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand, Dean W. Freeman +1 more | 1989-04-18 |
| 4820377 | Method for cleanup processing chamber and vacuum process module | Cecil J. Davis, Robert T. Matthews, Rhett B. Jucha | 1989-04-11 |
| 4820378 | Process for etching silicon nitride selectively to silicon oxide | — | 1989-04-11 |
| 4818326 | Processing apparatus | Jiann Liu, Cecil J. Davis | 1989-04-04 |