Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4878994 | Method for etching titanium nitride local interconnects | Rhett B. Jucha, Cecil J. Davis, Lee M. Loewenstein | 1989-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4878994 | Method for etching titanium nitride local interconnects | Rhett B. Jucha, Cecil J. Davis, Lee M. Loewenstein | 1989-11-07 |