Issued Patents 1989
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882008 | Dry development of photoresist | Cesar M. Garza, Lee M. Loewenstein, Cecil J. Davis | 1989-11-21 |
| 4863559 | Method for forming local interconnects using chlorine bearing agents | — | 1989-09-05 |
| 4855015 | Dry etch process for selectively etching non-homogeneous material bilayers | — | 1989-08-08 |
| 4855017 | Trench etch process for a single-wafer RIE dry etch reactor | — | 1989-08-08 |
| 4807016 | Dry etch of phosphosilicate glass with selectivity to undoped oxide | — | 1989-02-21 |