| 4886570 |
Processing apparatus and method |
Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Randall C. Hildenbrand, John I. Jones |
1989-12-12 |
| 4875989 |
Wafer processing apparatus |
Cecil J. Davis, Lee M. Loewenstein, Joe V. Abernathy, Timothy A. Wooldridge |
1989-10-24 |
| 4872938 |
Processing apparatus |
Cecil J. Davis, Joseph V. Abernathy, Randall C. Hildenbrand, Bruce Simpson, John I. Jones +2 more |
1989-10-10 |
| 4842686 |
Wafer processing apparatus and method |
Cecil J. Davis, Lee M. Loewenstein, John I. Jones, Rhett B. Jucha |
1989-06-27 |
| 4836905 |
Processing apparatus |
Cecil J. Davis, Joseph V. Abernathy, Randall C. Hildenbrand, Bruce Simpson, James G. Bohlman +2 more |
1989-06-06 |
| 4832778 |
Processing apparatus for wafers |
Cecil J. Davis, Dean W. Freeman, Joel T. Tomlin |
1989-05-23 |
| 4832777 |
Processing apparatus and method |
Cecil J. Davis |
1989-05-23 |
| 4832779 |
Processing apparatus |
Wayne G. Fisher, Tommy J. Bennett, Cecil J. Davis |
1989-05-23 |
| 4830700 |
Processing apparatus and method |
Cecil J. Davis, Wayne G. Fisher |
1989-05-16 |
| 4822450 |
Processing apparatus and method |
Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Randall C. Hildenbrand, Dean W. Freeman +1 more |
1989-04-18 |
| 4820377 |
Method for cleanup processing chamber and vacuum process module |
Cecil J. Davis, Rhett B. Jucha, Lee M. Loewenstein |
1989-04-11 |
| 4818327 |
Wafer processing apparatus |
Cecil J. Davis |
1989-04-04 |
| 4816116 |
Semiconductor wafer transfer method and arm mechanism |
Cecil J. Davis, Randall C. Hildenbrand |
1989-03-28 |
| 4816098 |
Apparatus for transferring workpieces |
Cecil J. Davis |
1989-03-28 |