Issued Patents 1989
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886570 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Lee M. Loewenstein, Rhett B. Jucha, Randall C. Hildenbrand | 1989-12-12 |
| 4872938 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson +2 more | 1989-10-10 |
| 4849067 | Method for etching tungsten | Rhett B. Jucha, Cecil J. Davis, Duane E. Carter, Sue Crank | 1989-07-18 |
| 4842686 | Wafer processing apparatus and method | Cecil J. Davis, Lee M. Loewenstein, Robert T. Matthews, Rhett B. Jucha | 1989-06-27 |
| 4838990 | Method for plasma etching tungsten | Rhett B. Jucha, Cecil J. Davis | 1989-06-13 |
| 4836905 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson +2 more | 1989-06-06 |
| 4822450 | Processing apparatus and method | Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand +1 more | 1989-04-18 |