Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4874723 | Selective etching of tungsten by remote and in situ plasma generation | Rhett B. Jucha, Cecil J. Davis, Sue Crank | 1989-10-17 |
| 4849067 | Method for etching tungsten | Rhett B. Jucha, Cecil J. Davis, Sue Crank, John I. Jones | 1989-07-18 |
| 4849068 | Apparatus and method for plasma-assisted etching | Cecil J. Davis, Rhett B. Jucha | 1989-07-18 |
| 4842680 | Advanced vacuum processor | Cecil J. Davis, Timothy J. Wooldridge | 1989-06-27 |