Issued Patents 1989
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4832777 | Processing apparatus and method | Robert T. Matthews | 1989-05-23 |
| 4830700 | Processing apparatus and method | Robert T. Matthews, Wayne G. Fisher | 1989-05-16 |
| 4830705 | Method for etch of GaAs | Lee M. Loewenstein | 1989-05-16 |
| 4828649 | Method for etching an aluminum film doped with silicon | Lee M. Loewenstein, Rhett B. Jucha | 1989-05-09 |
| 4822450 | Processing apparatus and method | Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand, Dean W. Freeman +1 more | 1989-04-18 |
| 4820377 | Method for cleanup processing chamber and vacuum process module | Robert T. Matthews, Rhett B. Jucha, Lee M. Loewenstein | 1989-04-11 |
| 4818326 | Processing apparatus | Jiann Liu, Lee M. Loewenstein | 1989-04-04 |
| 4818327 | Wafer processing apparatus | Robert T. Matthews | 1989-04-04 |
| 4816098 | Apparatus for transferring workpieces | Robert T. Matthews | 1989-03-28 |
| 4816116 | Semiconductor wafer transfer method and arm mechanism | Robert T. Matthews, Randall C. Hildenbrand | 1989-03-28 |