Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7623239 | Systems and methods for measurement of a specimen with vacuum ultraviolet light | John Fielden, Gary Janik | 2009-11-24 |
| 7564552 | Systems and methods for measurement of a specimen with vacuum ultraviolet light | John Fielden, Gary Janik | 2009-07-21 |
| 7535563 | Systems configured to inspect a specimen | Grace Hsiu-Ling Chen, Tao-Yi Fu, Jamie M. Sullivan, Greg Kirk | 2009-05-19 |
| 7489399 | Spectroscopic multi angle ellipsometry | — | 2009-02-10 |
| 7408641 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Hidong Kwak, Shankar Krishnan, Haixing Zou | 2008-08-05 |
| 7369233 | Optical system for measuring samples using short wavelength radiation | Mehrdad Nikoonahad, Hidong Kwak, Sergio Edelstein, Guoheng Zhao, Gary Janik | 2008-05-06 |
| 7359052 | Systems and methods for measurement of a specimen with vacuum ultraviolet light | John Fielden, Gary Janik | 2008-04-15 |
| 7359608 | Constructing well structures for hybrid optical waveguides | Ut Tran, David A. G. Deacon | 2008-04-15 |
| 7146086 | Constructing well structures for hybrid optical waveguides | Ut Tran, David A. G. Deacon | 2006-12-05 |
| 7070476 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Walter H. Johnson, John Fielden | 2006-07-04 |
| 6885190 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Walter H. Johnson, John Fielden | 2005-04-26 |
| 6787773 | Film thickness measurement using electron-beam induced x-ray microanalysis | — | 2004-09-07 |
| 6782164 | Thermally wavelength tunable laser having selectively activated gratings | David A. G. Deacon | 2004-08-24 |
| 6707540 | In-situ metalization monitoring using eddy current and optical measurements | Kurt Lehman, Walter H. Johnson, John Fielden, Guoheng Zhao, Mehrdad Nikoonahad | 2004-03-16 |
| 6647032 | Thermally wavelength tunable laser having selectively activated gratings | David A. G. Deacon | 2003-11-11 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Mehrdad Nikoonahad, Kalman Kele, Guoheng Zhao, Kurt Lehman | 2003-09-30 |
| 6621264 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Walter H. Johnson, John Fielden | 2003-09-16 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Haiming Wang, Adam E. Norton, Mehrdad Nikoonahad | 2003-08-26 |
| 6552803 | Detection of film thickness through induced acoustic pulse-echos | Haiming Wang, Mehrdad Nikoonahad | 2003-04-22 |
| 6514775 | In-situ end point detection for semiconductor wafer polishing | Haiguang Chen | 2003-02-04 |
| 6433541 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Walter H. Johnson, John Fielden | 2002-08-13 |
| 6268916 | System for non-destructive measurement of samples | Mehrdad Nikoonahad, Xing Chen | 2001-07-31 |
| 6184984 | System for measuring polarimetric spectrum and other properties of a sample | Haiming Wang, Adam E. Norton, Mehrdad Nikoonahad | 2001-02-06 |
| 6108087 | Non-contact system for measuring film thickness | Mehrdad Nikoonahad, Haiming Wang | 2000-08-22 |
| 5815270 | In-line fiber-optic polarimeter using a fused 1x5 star coupler | — | 1998-09-29 |