Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471571 | Substrate supporting carrier pad | — | 2002-10-29 |
| 6375559 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-04-23 |
| 6337281 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-01-08 |
| 6294473 | Method of polishing substrates comprising silicon dioxide and composition relating thereto | — | 2001-09-25 |
| 6245679 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik +1 more | 2001-06-12 |
| 6218305 | Composition and method for polishing a composite of silica and silicon nitride | Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang, Lee Melbourne Cook | 2001-04-17 |
| 6210525 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2001-04-03 |
| 6132637 | Composition and method for polishing a composite of silica and silicon nitride | Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang, Lee Melbourne Cook | 2000-10-17 |
| 6099394 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. | 2000-08-08 |
| 6095904 | Orbital motion chemical-mechanical polishing method and apparatus | Joseph R. Breivogel, Samuel F. Louke, Leopoldo D. Yau, Christopher E. Barns | 2000-08-01 |
| 6069080 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2000-05-30 |
| 5876271 | Slurry injection and recovery method and apparatus for chemical-mechanical polishing process | — | 1999-03-02 |
| 5554064 | Orbital motion chemical-mechanical polishing apparatus and method of fabrication | Joseph R. Breivogel, Samuel F. Louke, Leopoldo D. Yau, Christopher E. Barns | 1996-09-10 |
| 5212910 | Composite polishing pad for semiconductor process | Joseph R. Breivogel, Sam F. Louke, Leo D. Yau | 1993-05-25 |