Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6991514 | Optical closed-loop control system for a CMP apparatus and method of manufacture thereof | Andrew Weeks Kueny | 2006-01-31 |
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Paul Holzapfel, Robert A. Eaton | 2005-11-01 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Paul Holzapfel, Robert A. Eaton | 2004-10-19 |
| 6685537 | Polishing pad window for a chemical mechanical polishing tool | Clinton O. Fruitman, Periya Gopalan, Andrew Michael Yednak, III | 2004-02-03 |
| 6466642 | Methods and apparatus for the in-situ measurement of CMP process endpoint | — | 2002-10-15 |
| 6290584 | Workpiece carrier with segmented and floating retaining elements | Inki Kim, Mike K. Park | 2001-09-18 |
| 6287171 | System and method for detecting CMP endpoint via direct chemical monitoring of reactions | — | 2001-09-11 |
| 6283836 | Non-abrasive conditioning for polishing pads | Clinton O. Fruitman, John Natalicio | 2001-09-04 |
| 6273792 | Method and apparatus for in-situ measurement of workpiece displacement during chemical mechanical polishing | — | 2001-08-14 |
| 6264532 | Ultrasonic methods and apparatus for the in-situ detection of workpiece loss | — | 2001-07-24 |