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Method for inspecting pattern defects |
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EUV photomask |
Ching-Huang Chen, Hua-Tai Lin, Hsin-Chang Lee, Ming-Wei Chen |
2023-12-19 |
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EUV mask |
Ching-Huang Chen, Hua-Tai Lin, Hsin-Chang Lee, Ming-Wei Chen |
2022-09-20 |
| 10274818 |
Lithography patterning with sub-resolution assistant patterns and off-axis illumination |
Hua-Tai Lin, Yu YANG, Wen-Ta Liang, Ching-Huang Chen, Shih-Che Wang |
2019-04-30 |
| 10199228 |
Manufacturing method of metal gate structure |
Nien-Ting Ho, Chien-Hao Chen, Hsin-Fu Huang, Wei-Yu Chen, Min-Chuan Tsai +2 more |
2019-02-05 |
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Two-dimensional process window improvement |
Wei-De Ho, Ya Hui Chang, Hung-Chang Hsieh |
2017-07-11 |
| 9653300 |
Structure of metal gate structure and manufacturing method of the same |
Nien-Ting Ho, Chien-Hao Chen, Hsin-Fu Huang, Wei-Yu Chen, Min-Chuan Tsai +2 more |
2017-05-16 |
| 9076784 |
Transistor and semiconductor structure |
Min-Chuan Tsai, Hsin-Fu Huang, Chi-Mao Hsu, Chin-Fu Lin, Chien-Hao Chen +3 more |
2015-07-07 |
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MOS transistor and process thereof |
Ya-Hsueh Hsieh, Chi-Mao Hsu, Hsin-Fu Huang, Min-Chuan Tsai, Chien-Hao Chen +2 more |
2015-03-10 |
| 8836049 |
Semiconductor structure and process thereof |
Min-Chuan Tsai, Hsin-Fu Huang, Chi-Mao Hsu, Chin-Fu Lin, Chien-Hao Chen +3 more |
2014-09-16 |
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Method for forming semiconductor structure having TiN layer |
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2014-05-27 |
