Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274818 | Lithography patterning with sub-resolution assistant patterns and off-axis illumination | Hua-Tai Lin, Yu YANG, Ching-Huang Chen, Chi-Yuan Sun, Shih-Che Wang | 2019-04-30 |