Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096613 | Semiconductor device and method for manufacturing same | Atsushi Takahashi | 2018-10-09 |
| 10014186 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Hisashi Okuchi, Hiroaki Yamada | 2018-07-03 |
| 9997533 | Semiconductor device and method for manufacturing same | Satoshi Wakatsuki, Yohei Sato, Keiichi Sawa | 2018-06-12 |
| 9991159 | Semiconductor device manufacture method | Fuyuma Ito, Yuya Akeboshi, Hisashi Okuchi, Masayuki Kitamura | 2018-06-05 |
| 9793293 | Semiconductor device and method for manufacturing same | Kosuke Horibe, Shinichi Nakao, Kouji Matsuo, Kei Watanabe, Atsuko Sakata | 2017-10-17 |
| 9673217 | Semiconductor device and method for manufacturing same | Atsuko Sakata, Yohei Sato, Satoshi Wakatsuki, Takeshi Ishizaki, Masayuki Kitamura +8 more | 2017-06-06 |
| 9653475 | Semiconductor device and method of manufacturing the same | Hiroaki Yamada, Yoshinori Kitamura, Yoshihiro Ogawa | 2017-05-16 |
| 9646989 | Three-dimensional memory device | Akifumi GAWASE, Yuya Akeboshi | 2017-05-09 |
| 9384980 | Manufacturing method of semiconductor device | Mitsuhiro Omura, Hisashi Okuchi, Satoshi Wakatsuki, Tsubasa Imamura | 2016-07-05 |
| 9065064 | Manufacturing method and manufacturing apparatus of functional element | Hiroshi Tomita, Hisashi Okuchi, Yusuke Tanaka | 2015-06-23 |
| 8952441 | Nonvolatile semiconductor memory device and method of manufacturing the same | Kiwamu Sakuma, Haruka Kusai, Masahiro Kiyotoshi | 2015-02-10 |
| 8865563 | Film embedding method and semiconductor device | Hisashi Okuchi, Hiroshi Tomita | 2014-10-21 |
| 8772164 | Method for forming interconnection pattern and semiconductor device | Satoshi Wakatsuki, Hisashi Okuchi, Atsuko Sakata, Hiroshi Tomita | 2014-07-08 |
| 8741168 | Wet etching method for silicon nitride film | Hisashi Okuchi, Hiroshi Tomita | 2014-06-03 |
| 8695145 | Cleaning method, cleaning apparatus | Hisashi Okuchi, Hiroshi Tomita | 2014-04-15 |
| 8567420 | Cleaning apparatus for semiconductor wafer | Minako Inukai, Hiroshi Tomita, Kaori Umezawa, Linan Ji | 2013-10-29 |
| 8546786 | Stacked multiple cell nonvolatile memory device | Fumiki Aiso, Atsushi Fukumoto, Takashi Nakao | 2013-10-01 |
| 8115245 | Nonvolatile memory device | Fumiki Aiso, Atsushi Fukumoto, Takashi Nakao | 2012-02-14 |