Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7326515 | Positive type resist composition and resist pattern formation method using same | Takeshi Iwai, Satoshi Fujimura, Miwa Miyairi, Hideo Hada | 2008-02-05 |
| 7323287 | Positive type resist composition and resist pattern formation method using same | Takeshi Iwai, Satoshi Fujimura, Miwa Miyairi, Hideo Hada | 2008-01-29 |
| 7316885 | Method of forming resist pattern, positive resist composition, and layered product | Hideo Hada, Miwa Miyairi, Takeshi Iwai | 2008-01-08 |
| 7316888 | Positive type resist composition and resist pattern formation method using same | Takeshi Iwai, Satoshi Fujimura, Miwa Miyairi, Hideo Hada | 2008-01-08 |
| 7316889 | Positive type resist composition and resist pattern formation method using same | Takeshi Iwai, Satoshi Fujimura, Miwa Miyairi, Hideo Hada | 2008-01-08 |
| 7129020 | Liquid coating composition for forming a top antireflective film and photoresist laminate using the same, as well as method for forming photoresist pattern | Kazumasa Wakiya, Shigeru Yokoi, Takayuki Haraguchi | 2006-10-31 |
| 7074543 | Positive resist composition and method of forming resist pattern from the same | Takeshi Iwai, Satoshi Fujimura, Miwa Miyairi, Hideo Hada | 2006-07-11 |
| 7033731 | Multilayered body for photolithographic patterning | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2006-04-25 |
| 6864036 | Negative-working photoresist composition | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2005-03-08 |
| 6455228 | Multilayered body for photolithographic patterning | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2002-09-24 |
| 6416930 | Composition for lithographic anti-reflection coating, and resist laminate using the same | Kazumasa Wakiya, Shigeru Yokoi, Masakazu Kobayashi | 2002-07-09 |
| 6406829 | Negative-working photoresist composition | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2002-06-18 |