Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5239182 | Wafer conveyor apparatus and method for detecting inclination of wafer inside cassette | Kiyohisa Tateyama | 1993-08-24 |
| 5127362 | Liquid coating device | Haruo Iwatsu, Junro Iwakiri | 1992-07-07 |
| 5061144 | Resist process apparatus | Masami Akimoto, Yoshio Kimura, Osamu Hirakawa, Noriyuki Anai, Masanori Tateyama | 1991-10-29 |
| 5028955 | Exposure apparatus | Yasushi Hayashida, Noriyuki Anai, Osamu Hirakawa, Masami Akimoto, Keisuke Shigaki +1 more | 1991-07-02 |
| 4504764 | Cathode ray tube with color selecting grill | Koji Saita, Akihiro Kojima | 1985-03-12 |