Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901545 | Ionized physical vapor deposition (iPVD) process | Frank M. Cerio, Jr., Bruce Gittleman, Rodney L. Robison | 2011-03-08 |
| 7897217 | Method and system for performing plasma enhanced atomic layer deposition | — | 2011-03-01 |
| 7771790 | Method and system for fabricating a nano-structure | — | 2010-08-10 |
| 7744735 | Ionized PVD with sequential deposition and etching | Rodney L. Robison, Bruce Gittleman, Tugrul Yasar, Frank M. Cerio, Jr., Jozef Brcka | 2010-06-29 |
| 7727912 | Method of light enhanced atomic layer deposition | Tadahiro Ishizaka, Frank M. Cerio, Jr. | 2010-06-01 |
| 7569491 | Method for enlarging a nano-structure | — | 2009-08-04 |
| 7485338 | Method for precursor delivery | — | 2009-02-03 |
| 7182816 | Particulate reduction using temperature-controlled chamber shield | Mark Kleshock, Tim Provencher | 2007-02-27 |
| 5972790 | Method for forming salicides | Chantal Arena, Robert F. Foster, Joseph T. Hillman, Michael S. Ameen | 1999-10-26 |