Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7591201 | MEMS structure having a compensated resonating member | David H. Bernstein, Emmanuel P. Quevy | 2009-09-22 |
| 7522019 | Internal electrostatic transduction structures for bulk-mode micromechanical resonators | Sunil Bhave | 2009-04-21 |
| 7514853 | MEMS structure having a stress inverter temperature-compensated resonating member | Emmanuel P. Quevy, David H. Bernstein | 2009-04-07 |
| 7256107 | Damascene process for use in fabricating semiconductor structures having micro/nano gaps | Hideki Takeuchi, Emmanuel P. Quevy, Tsu-Jae King | 2007-08-14 |
| 7211926 | Temperature compensated oscillator including MEMS resonator for frequency control | Emmanuel P. Quevy | 2007-05-01 |
| 7151277 | Selective etching of silicon carbide films | Di Gao, Roya Maboudian | 2006-12-19 |
| 6481285 | Micro-machined angle-measuring gyroscope | Andrei M. Shkel | 2002-11-19 |
| 6478974 | Microfabricated filter and shell constructed with a permeable membrane | Kyle S. Lebouitz, Albert P. Pisano | 2002-11-12 |
| 6448622 | Polycrystalline silicon-germanium films for micro-electromechanical systems application | Andrea Franke, Tsu-Jae King | 2002-09-10 |
| 6296779 | Method of fabricating a sensor | William A. Clark, Thor Juneau | 2001-10-02 |
| 6250156 | Dual-mass micromachined vibratory rate gyroscope | Ashwin Arunkuman Seshia | 2001-06-26 |
| 6236281 | Q-controlled microresonators and tunable electronic filters using such resonators | Clark T.-C. Nguyen | 2001-05-22 |
| 6210988 | Polycrystalline silicon germanium films for forming micro-electromechanical systems | Andrea Franke, Tsu-Jae King | 2001-04-03 |
| 6142358 | Wafer-to-wafer transfer of microstructures using break-away tethers | Michael B. Cohn | 2000-11-07 |
| 6114044 | Method of drying passivated micromachines by dewetting from a liquid-based process | Michael R. Houston, Roya Maboudian, Uthara Srinivasan | 2000-09-05 |
| 6067858 | Micromachined vibratory rate gyroscope | William A. Clark, Thor Juneau | 2000-05-30 |
| RE36498 | Sensor with separate actuator and sense fingers | Stephen F. Bart | 2000-01-18 |
| 5969249 | Resonant accelerometer with flexural lever leverage system | Trey Roessig, Albert P. Pisano | 1999-10-19 |
| 5955932 | Q-controlled microresonators and tunable electric filters using such resonators | Clark T.-C. Nguyen | 1999-09-21 |
| 5919364 | Microfabricated filter and shell constructed with a permeable membrane | Kyle S. Lebouitz, Albert P. Pisano | 1999-07-06 |
| 5879963 | Method of making a sub-ground plane for a micromachined device | Richard S. Payne, Stephen F. Bart | 1999-03-09 |
| 5858809 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Richard S. Payne, Yang Zhao, Theresa A. Core, Steven J. Sherman | 1999-01-12 |
| 5839062 | Mixing, modulation and demodulation via electromechanical resonators | Clark T.-C. Nguyen, Vadim Gutnik | 1998-11-17 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Richard S. Payne, Yang Zhao, Theresa A. Core, Steven J. Sherman | 1997-06-17 |
| 5639542 | Sub-ground plane for micromachined device | Richard S. Payne, Stephen F. Bart | 1997-06-17 |