Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6192757 | Monolithic micromechanical apparatus with suspended microstructure | Robert W. K. Tsang, Steven J. Sherman, A. Paul Brokaw | 2001-02-27 |
| 6009753 | Monolithic micromechanical apparatus with suspended microstructure | Robert W. K. Tsang, Steven J. Sherman, A. Paul Brokaw | 2000-01-04 |
| 5858809 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Steven J. Sherman | 1999-01-12 |
| 5847280 | Monolithic micromechanical apparatus with suspended microstructure | Steven J. Sherman, Robert W. K. Tsang, A. Paul Brokaw | 1998-12-08 |
| 5828115 | Micromachined device with ground plane under sensor | — | 1998-10-27 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Steven J. Sherman | 1997-06-17 |
| 5620931 | Methods for fabricating monolithic device containing circuitry and suspended microstructure | Robert W. K. Tsang | 1997-04-15 |
| 5578224 | Method of making micromachined device with ground plane under sensor | — | 1996-11-26 |
| 5540095 | Monolithic accelerometer | Steven J. Sherman, A. Paul Brokaw, Robert W. K. Tsang | 1996-07-30 |
| 5417111 | Monolithic chip containing integrated circuitry and suspended microstructure | Steven J. Sherman, Robert W. K. Tsang, A. Paul Brokaw | 1995-05-23 |
| 5345824 | Monolithic accelerometer | Steven J. Sherman, A. Paul Brokaw, Robert W. K. Tsang | 1994-09-13 |
| 5326726 | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure | Robert W. K. Tsang | 1994-07-05 |
| 5314572 | Method for fabricating microstructures | Roger T. Howe | 1994-05-24 |