Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8598891 | Detection and mitigation of particle contaminants in MEMS devices | Vineet Kumar, William A. Clark, John A. Geen, Edward L. Wolfe | 2013-12-03 |
| 8421481 | Detection and mitigation of particle contaminants in MEMS devices | Vineet Kumar, William A. Clark, John A. Geen, Edward L. Wolfe | 2013-04-16 |
| 6192757 | Monolithic micromechanical apparatus with suspended microstructure | Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw | 2001-02-27 |
| 6009753 | Monolithic micromechanical apparatus with suspended microstructure | Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw | 2000-01-04 |
| 5858809 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Theresa A. Core | 1999-01-12 |
| 5847280 | Monolithic micromechanical apparatus with suspended microstructure | Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw | 1998-12-08 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Theresa A. Core | 1997-06-17 |
| 5540095 | Monolithic accelerometer | A. Paul Brokaw, Robert W. K. Tsang, Theresa A. Core | 1996-07-30 |
| 5465604 | Method for adjusting sensitivity of a sensor | — | 1995-11-14 |
| 5417111 | Monolithic chip containing integrated circuitry and suspended microstructure | Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw | 1995-05-23 |
| 5345824 | Monolithic accelerometer | A. Paul Brokaw, Robert W. K. Tsang, Theresa A. Core | 1994-09-13 |