Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6192757 | Monolithic micromechanical apparatus with suspended microstructure | Theresa A. Core, Steven J. Sherman, A. Paul Brokaw | 2001-02-27 |
| 6009753 | Monolithic micromechanical apparatus with suspended microstructure | Theresa A. Core, Steven J. Sherman, A. Paul Brokaw | 2000-01-04 |
| 5847280 | Monolithic micromechanical apparatus with suspended microstructure | Steven J. Sherman, Theresa A. Core, A. Paul Brokaw | 1998-12-08 |
| 5620931 | Methods for fabricating monolithic device containing circuitry and suspended microstructure | Theresa A. Core | 1997-04-15 |
| 5543013 | Method of forming a microstructure with bare silicon ground plane | Jeffrey A. Farash, Richard S. Payne | 1996-08-06 |
| 5540095 | Monolithic accelerometer | Steven J. Sherman, A. Paul Brokaw, Theresa A. Core | 1996-07-30 |
| 5417111 | Monolithic chip containing integrated circuitry and suspended microstructure | Steven J. Sherman, Theresa A. Core, A. Paul Brokaw | 1995-05-23 |
| 5345824 | Monolithic accelerometer | Steven J. Sherman, A. Paul Brokaw, Theresa A. Core | 1994-09-13 |
| 5326726 | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure | Theresa A. Core | 1994-07-05 |