Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6282960 | Micromachined device with enhanced dimensional control | Howard R. Samuels | 2001-09-04 |
| 5880369 | Micromachined device with enhanced dimensional control | Howard R. Samuels | 1999-03-09 |
| 5543013 | Method of forming a microstructure with bare silicon ground plane | Robert W. K. Tsang, Richard S. Payne | 1996-08-06 |