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Utilization of microphone ultrasonic response |
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| 11990917 |
Incremental analog to digital converter incorporating noise shaping and residual error quantization |
Omid Oliaei |
2024-05-21 |
| 11162928 |
Humidity correction method in thermistor based gas sensing platform |
Nishit Goel |
2021-11-02 |
| 10458870 |
Pressure sensor with real time health monitoring and compensation |
Lei Gu, Paul D. Lucas, Phillip W. Sullivan |
2019-10-29 |
| 10352800 |
Micromachined bulk acoustic wave resonator pressure sensor |
Srinivas Tadigadapa, Nishit Goel |
2019-07-16 |
| 10107315 |
MEMS pressure sensors with integrated baffles |
Lei Gu |
2018-10-23 |
| 9850123 |
Stress relief MEMS structure and package |
Lei Gu |
2017-12-26 |
| 9562820 |
Pressure sensor with real time health monitoring and compensation |
Lei Gu, Paul D. Lucas, Philip W. Sullivan |
2017-02-07 |
| 9499393 |
Stress relief MEMS structure and package |
Lei Gu |
2016-11-22 |
| 9335231 |
Micro-Pirani vacuum gauges |
Lei Gu, Ole Wenzel |
2016-05-10 |
| RE36498 |
Sensor with separate actuator and sense fingers |
Roger T. Howe |
2000-01-18 |
| 5879963 |
Method of making a sub-ground plane for a micromachined device |
Roger T. Howe, Richard S. Payne |
1999-03-09 |
| 5639542 |
Sub-ground plane for micromachined device |
Roger T. Howe, Richard S. Payne |
1997-06-17 |
| 5565625 |
Sensor with separate actuator and sense fingers |
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1996-10-15 |
| 5293094 |
Miniature actuator |
Anita M. Flynn, Lee S. Tavrow, Rodney Allen Brooks, Leslie E. Cross |
1994-03-08 |
