Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5589082 | Microelectromechanical signal processor fabrication | Liwei Lin, Clark T.-C. Nguyen, Albert P. Pisano | 1996-12-31 |
| 5565625 | Sensor with separate actuator and sense fingers | Stephen F. Bart | 1996-10-15 |
| 5542295 | Apparatus to minimize stiction in micromachined structures | H. Jerome Barber, Michael Judy | 1996-08-06 |
| 5537083 | Microelectromechanical signal processors | Liwei Lin, Clark T.-C. Nguyen, Albert P. Pigano | 1996-07-16 |
| 5491604 | Q-controlled microresonators and tunable electronic filters using such resonators | Clark T.-C. Nguyen | 1996-02-13 |
| 5455547 | Microelectromechanical signal processors | Liwei Lin, Clark T.-C. Nguyen, Albert P. Pisano | 1995-10-03 |
| 5403665 | Method of applying a monolayer lubricant to micromachines | Rodney L. Alley, Kyriakos Komyopoulos | 1995-04-04 |
| 5314572 | Method for fabricating microstructures | Theresa A. Core | 1994-05-24 |
| 5043043 | Method for fabricating side drive electrostatic micromotor | Jeffrey H. Lang, Martin F. Schlecht, Martin Schmidt, Stephen D. Senturia, Mehran Mehregany +1 more | 1991-08-27 |
| 5025346 | Laterally driven resonant microstructures | William C. Tang | 1991-06-18 |
| 4997521 | Electrostatic micromotor | Jeffrey H. Lang, Martin F. Schlecht, Martin Schmidt, Stephen D. Senturia | 1991-03-05 |
| 4943750 | Electrostatic micromotor | Jeffrey H. Lang, Martin F. Schlecht, Martin Schmidt, Stephen D. Senturia | 1990-07-24 |
| 4896098 | Turbulent shear force microsensor | Joseph H. Haritonidis, Martin Schmidt, Stephen D. Senturia | 1990-01-23 |
| 4860232 | Digital technique for precise measurement of variable capacitance | Hae-Seung Lee, Joseph T. Kung | 1989-08-22 |
| 4851080 | Resonant accelerometer | Shih-Chia Chang | 1989-07-25 |
| 4823607 | Released film structures and method of measuring film properties | Mehran Mehregany, Stephen D. Senturia | 1989-04-25 |
| 4805456 | Resonant accelerometer | Shih-Chia Chang | 1989-02-21 |
| 4674319 | Integrated circuit sensor | Richard S. Muller | 1987-06-23 |