Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079246 | Integrated MEMS metrology device using complementary measuring combs | David Garmire, Hyuck Choo, James Demmel, Sanjay Govindjee | 2011-12-20 |
| 7656568 | Optical switch using frequency-based addressing in a microelectromechanical systems array | Hyuck Choo | 2010-02-02 |
| 7573022 | Method for fabricating vertically-offset interdigitated comb actuator device | Hyuck Choo, David Garmire, James Demmel | 2009-08-11 |
| 7564559 | MEMS-based, phase-shifting interferometer | Hyuck Choo, David Garmire, James Demmel, Rishi Kant | 2009-07-21 |
| 7355793 | Optical system applicable to improving the dynamic range of Shack-Hartmann sensors | Hyuck Choo | 2008-04-08 |
| 7301177 | Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam | Behrang Behin, Kam-Yin Lau | 2007-11-27 |
| 7079299 | Staggered torsional electrostatic combdrive and method of forming same | Robert Conant, Jocelyn Nee, Kam-Yin Lau | 2006-07-18 |
| 6962830 | Global mechanical stop | Behrang Behin, Kam-Yin Lau | 2005-11-08 |
| 6897539 | Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam | Behrang Behin, Kam-Yin Lau | 2005-05-24 |
| 6758983 | Staggered torsional electrostatic combdrive and method of forming same | Robert Conant, Jocelyn Nee, Kam-Yin Lau | 2004-07-06 |
| 5945898 | Magnetic microactuator | Jack Judy | 1999-08-31 |
| 5867297 | Apparatus and method for optical scanning with an oscillatory microelectromechanical system | Meng-Hsiung Kiang, Kam-Yin Lau, Olav Solgaard | 1999-02-02 |
| 5493177 | Sealed micromachined vacuum and gas filled devices | Carlos H. Mastrangelo, Kirt Williams | 1996-02-20 |
| 5285131 | Vacuum-sealed silicon incandescent light | Carlos H. Mastrangelo | 1994-02-08 |
| 5252881 | Micro motors and method for their fabrication | Longsheng Fan, Yu-Chong Tai | 1993-10-12 |
| 4849695 | Null-detection magnetometers | Juan I. Coicolea | 1989-07-18 |
| 4816125 | IC processed piezoelectric microphone | Eun Sok Kim | 1989-03-28 |
| 4801883 | Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers | Juan I. Goicolea | 1989-01-31 |
| 4783821 | IC processed piezoelectric microphone | Eun Sok Kim | 1988-11-08 |
| 4740410 | Micromechanical elements and methods for their fabrication | Longsheng Fan, Yu-Chong Tai | 1988-04-26 |
| 4674319 | Integrated circuit sensor | Roger T. Howe | 1987-06-23 |
| 4659460 | Mobile fluid purification unit | Richard C. Dickerson | 1987-04-21 |
| 4608865 | Integrated pyroelectric sensor and method | Dennis L. Polla | 1986-09-02 |
| 4383920 | Mobile fluid purification system | Richard C. Dickerson | 1983-05-17 |
| 4361026 | Method and apparatus for sensing fluids using surface acoustic waves | Richard M. White | 1982-11-30 |