| 7301177 |
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam |
Kam-Yin Lau, Richard S. Muller |
2007-11-27 |
| 7183633 |
Optical cross-connect system |
Michael Julian Daneman, Franklin J. Wall, Jr., Murali Chaparala, Mark Chang, Scott Dalton +5 more |
2007-02-27 |
| 7023604 |
Three dimensional optical switches and beam steering modules |
Robert Conant, Michael Julian Daneman, David Horsley, Meng-Hsiung Kiang, David Lerner +1 more |
2006-04-04 |
| 6962830 |
Global mechanical stop |
Kam-Yin Lau, Richard S. Muller |
2005-11-08 |
| 6897539 |
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam |
Kam-Yin Lau, Richard S. Muller |
2005-05-24 |
| 6887391 |
Fabrication and controlled release of structures using etch-stop trenches |
Michael Julian Daneman |
2005-05-03 |
| 6888979 |
MEMS mirrors with precision clamping mechanism |
Michael Julian Daneman, Chuang-Chia Lin, Boris Kobrin, Murali Chaparala, Gary M. Zalewski |
2005-05-03 |
| 6819822 |
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
Michael Julian Daneman, Meng-Hsiung Kiang, Kam-Yin Lau, Satinderpall S. Pannu |
2004-11-16 |
| 6788520 |
Capacitive sensing scheme for digital control state detection in optical switches |
Michael Julian Daneman, Meng-Hsiung Kiang, Kam-Yin Lau, Timothy Beerling |
2004-09-07 |
| 6764936 |
Mechanical landing pad formed on the underside of a MEMS device |
Michael Julian Daneman, Meng-Hsiung Kiang |
2004-07-20 |
| 6744173 |
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
Satinderpall S. Pannu |
2004-06-01 |
| 6629461 |
Biased rotatable combdrive actuator methods |
Satinderpall S. Pannu |
2003-10-07 |
| 6612029 |
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
Satinderpall S. Pannu |
2003-09-02 |
| 6593677 |
Biased rotatable combdrive devices and methods |
Satinderpall S. Pannu |
2003-07-15 |
| 6586841 |
Mechanical landing pad formed on the underside of a MEMS device |
Michael Julian Daneman, Meng-Hsiung Kiang |
2003-07-01 |
| 6528887 |
Conductive equipotential landing pads formed on the underside of a MEMS device |
Michael Julian Daneman |
2003-03-04 |
| 6480319 |
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays |
Michael Julian Daneman, Satinderpall S. Pannu |
2002-11-12 |
| 6473544 |
Optical switch having equalized beam spreading in all connections |
Michael Julian Daneman, Meng-Hsiung Kiang, Kam-Yin Lau |
2002-10-29 |
| 6449407 |
Optical switch having equalized beam spreading in all connections |
Meng-Hsiung Kiang, Michael Julian Daneman, Kam-Yin Lau |
2002-09-10 |
| 6437902 |
Optical beam steering switching system |
Michael Julian Daneman, Satinderpall S. Pannu |
2002-08-20 |
| 6330102 |
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics |
Michael Julian Daneman, Satinderpall S. Pannu |
2001-12-11 |