Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079246 | Integrated MEMS metrology device using complementary measuring combs | David Garmire, Hyuck Choo, Richard S. Muller, Sanjay Govindjee | 2011-12-20 |
| 7573022 | Method for fabricating vertically-offset interdigitated comb actuator device | Hyuck Choo, David Garmire, Richard S. Muller | 2009-08-11 |
| 7564559 | MEMS-based, phase-shifting interferometer | Hyuck Choo, Richard S. Muller, David Garmire, Rishi Kant | 2009-07-21 |